The result was a machine with hundreds of thousands of components that took tens of billions of dollars and several decades to develop. The miracle isn’t simply that EUV lithography works, but that it does so reliably enough to produce chips cost-effectively. ... Producing advanced semiconductors, however, has relied on some of the most complex machinery ever made. ASML’s EUV lithography tool is the most expensive mass-produced machine tool in history, so complex it’s impossible to use without extensive training from ASML personnel, who remain on-site for the tool’s entire life span. Each EUV scanner has an ASML logo on its side. But ASML’s expertise, the company readily admits, was its ability to orchestrate a far-flung network of optics experts, software designers, laser companies, and many others whose capabilities were needed to make the dream of EUV a reality.